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Tosetz system is not just a Gas abatement system. It's a Wet and Powder removal system

Panacea & EX Series

Gas abatement system 

Product Line-up

Tosetz Panacea series are designed for abatement of toxic effluent exhaust gases and for removal powder from Semiconductor and LCD production tools such as CVD, Dry etcher.

Tosetz has strengths in big-flow rate scrubbers installed indoors and clean rooms.

Panacea Series

P-200V-M2

Tosetz main product, High abatement efficiency

with microbubble and High up-time.

Plentiful supply record for gas abatement

and Powder removal(By-products).

■ Process tools

・ Dry etcher、CVD、Epitaxial growth system

 Abated gas

・ Cl2, HF, HCl, CVD burned exhaust gas

・ Powder removal (By-products)

 Gas flow rate

・ Max.:~4000L/min

Ex Series

Conventional shower and bubbling type

Suitable for abatement of small~big gas flow rate

NaOH dosing type

■ Process tools

・ Wet etching tool、CVD、Wet cleaning tool

・ Epitaxial growth system、Vent gas for cylinder

      cabinet

 Abated gas

・ Cl2, HF, HCl, HNO3,NH4

・ CVD burned exhaust gas, Organic/inorganic gas

 Gas flow rate

・ Max.:~60m3/min

Panacea Series

Micro-bubble Wet Scrubber

Reduce cancer-causing substances

99% or more of Cl2 removed only with water

Improve yield of manufacturing process

Plentiful supply record for LCD Fab

■ Process tools

・ Dry etcher、CVD、Epitaxial growth system

 Abated gas

・ Cl2, HF, HCl, CVD burned exhaust gas

・ Powder removal (By-products)

 Gas flow rate

・ Max.:~4000L/min

■ Feature

・ Halogen-based gases such as Cl2, F2 exhausted from

      dry etcher are abated 99.7% or more only with water

・ Achieve 99% or more removal of the powder,

      by-products (2.5 um) generated from dry etcher

・ Big reduction of running cost by using recycle water

      and not using chemicals

・ Efficient removal of powder in the latter stage of burner

      for CVD and Epi tools

・ Reduce cancer-causing substances proceeded from burner

・ Big reduction of down time of manufacturing tools

      by improving maintenance cycle of burner

Ex Series

Bubbling & Spray type Scrubber

Supply records of 1000 or more

 in Japan and overseas.

Big-flow rate scrubbers installed

indoors and clean rooms.

■ Process tools

・ Wet etching tool、CVD、Wet cleaning tool

・ Epitaxial growth system、Vent gas for cylinder cabinet

 Abated gas

・ Cl2, HF, HCl, HNO3, NH4

・ CVD burned exhaust gas, Organic/inorganic gas

 Gas flow rate

・ Max.:~60m3/min

■ Feature

・ Plentiful supply records and stable operation

・ Supply records of 1000 or more in Japan and overseas

・ Big-flow rate scrubbers installed indoors and clan rooms

・ Use an anti-corrosion fan. Seal and anti-corrosion measure

      on fan impeller

・ Use SUS for organic gas and PVC for inorganic gas

Panacea Case Study
Combination of other abatement system
Example:Combination with PFC cracking systems such as Plasma system,
Burn systemCatalyst system, PFC gas recovery system

Panacea & EX Combined Type

Micro-bubble & Spray type Wet Scrubber

Model No.:P-200V-HA-M2
Max. flow rate : 200L/min

Yield improvement of

Mass production system

Plentiful supply record

for LCD industry in Asia

P-200V-HA-M2
High abatement performance
by micro bubble

Abatement efficiency

Cl2 >99%, SiF4 >99%

液晶工場・半導体工場向けドライエッチング装置用 湿式除害装置
ドライエッチング装置~PFC燃焼除害装置の間に設置します。
風力タービン

特長1:
Fluorine gas is abated with Panacea, and chlorine gas is abated with the NaOH scrubber.
The reaction products and fluorine gas generated in the dry etching process are treated with Panacea,
and the chlorine gas is treated with NaOH scrubber in the 2nd stage.

特長2:
Reduce cancer-causing substances proceeded from burner.
By abating fluorine gas and chlorine gas separately, the generation of by-products in the abatement system is suppressed,
and by abating chlorine gas with NaOH scrubber, Dioxin is generated in burner is reduced.

特長3:
Yield improvement of mass production and Big reduction of burner PM costPanacea can realize the yield improvement of mass production and big reduction of burner PM cost.

CONTACT

We​​lcome to Tosetz Support and Thank you for your interest in Tosetz.

Please let us know your story. Our sales department will respond promptly.

Call us

+81-4-2519-3037

【Available】Mon.~Fri 9:00~18:00
(Service are not available on Saturdays, Sundays, public holidays)
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