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Gas abatement system（Wet Scrubber）
Products
Tosetz has two kinds of main Scrubbers and can propose the best solutions for your purpose.
Panacea is a high efficient water scrubber using microbubble.
It is our standard model and main product in these days.
Tosetz Gas abatement system
Tosetz abatement systems are designed for abatement of toxic effluent exhaust gases from Semiconductor and LCD production tools. They are for the treatment of exhaust gases from CVD, Dry etcher, wet stations, wet stripping Tools,etc.
Exhaust from Burner
Suppress carcinogen
Cl2 abatement efficiency
more than
99%
Production equipment
Improvement
yield
LCD Fab
Many
Installation base
Abated gas & Used process tool
Abated gas
Cl2、BCl3、HBr、HCl、SF6、CF4、HF、COF2、ClF3、NH3、POCl3、SiCl4、SiF4、GeCl4、F2
Used process tool
＜Etcher＞
Dry etcher, Wet etcher
＜Other equipm＞
Epitaxial growth system, Phosphorus diffusion system, Vent gas for cylinder cabinet, Wet type cleaning system, Wet type resist stripping system, Gas abatement for emergent vent and Powder removal
Combination of other abatement system
Example：Combination with PFC cracking systems such as Plasma system,
Burn systemCatalyst system, PFC gas recovery system
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