Gas abatement system(Wet Scrubber)

Tosetz Gas abatement system

Tosetz abatement systems are designed for abatement of toxic effluent exhaust gases from Semiconductor and LCD production tools. They are for the treatment of exhaust gases from CVD, Dry etcher, wet stations, wet stripping Tools,etc.

Exhaust from Burner
Suppress carcinogen
Cl2 abatement efficiency
more than
99%
Production equipment
Improvement
yield
LCD Fab
Many
Installation base

Abated gas & Used process tool

Abated gas
Cl2、BCl3、HBr、HCl、SF6、CF4、HF、COF2、ClF3、NH3、POCl3、SiCl4、SiF4、GeCl4、F2
Used process tool
<Etcher>
Dry etcher, Wet etcher
 
<Other equipm>

Epitaxial growth system, Phosphorus diffusion system, Vent gas for cylinder cabinet, Wet type cleaning system, Wet type resist stripping system, Gas abatement for emergent vent and Powder removal

Panacea導入例
Combination of other abatement system
Example:Combination with PFC cracking systems such as Plasma system,
Burn systemCatalyst system, PFC gas recovery system

Products

Tosetz has two kinds of main Scrubbers  and can propose the best solutions for your purpose.

Panacea is a high efficient water scrubber using microbubble.

It is our standard model and main product in these days.

P-200V-M2_修正.png

Ex series is a scrubber using shower and bubbling.

Name:Panacea

Model:P-200V-HA-M2

P-200V-HA-M2.png

Tosetz Scrubber catalog

Please download the following Tosetz Scrubber catalog.

CONTACT

We​​lcome to Tosetz Support and Thank you for your interest in Tosetz.

Call us

+81-4-2519-3037

 【Available】Mon.~Fri 9:00~18:00
(Service are not available on Saturdays, Sundays, public holidays)