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Gas abatement system(Wet Scrubber)
Product Line-up
Most suitable equipment from three types of wet processing method for a wide range of applications can be proposed according to the customer's application.

Cleaning tool
■ Alkaline cleaning
■ Water-insoluble cleaning
■ Surfactant cleaning

Resist Strip tool
■ Resist stripping
■ Lift off
■ Coater cup cleaning

Metal Etching tool
■ Selective etching
■ Control etching